Semiconductors
AUSTIN, Texas – Xitronix Corp. claims KLA-Tencor fraudulently prosecuted a patent to monopolize the $650 million dopant activation metrology market, involving semiconductor wafers, in Federal Court.
AUSTIN, Texas – Xitronix Corp. claims KLA-Tencor fraudulently prosecuted a patent to monopolize the $650 million dopant activation metrology market, involving semiconductor wafers, in Federal Court.