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Antitrust Claim Zooms In On Boron

SAN JOSE (CN) - Advanced Technology Materials Inc. abuses patent laws to monopolize "a key dopant gas, isotopically enriched boron trifluoride, a necessary component in the fabrication of semiconductors," Praxair claims in a federal antitrust complaint. The electronics industry uses such "sub-atmospheric gas delivery systems" to coat silicon wafers with chemicals in molecularly thin layers.

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